Mass sensor using mode localization in two weakly coupled MEMS cantilevers with different lengths: Design and experimental model validation
Authors:
- Toky RabenimananaTRToky Rabenimanana
- Vincent WalterVWVincent Walter
- Najib KacemNajib Kacem
- Patrice Le MoalPMPatrice Le Moal
- Gilles BourbonGBGilles Bourbon
- Joseph LardièsJLJoseph Lardiès
- 1 August 2019
- journal article
- research article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 295, 643-652
Abstract
No abstract availableKeywords
Funding Information
- Agence Nationale de la Recherche
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