Spatially differentiated crystalline inorganic coatings deposited by an atmospheric pressure dielectric barrier discharge with immobilized filaments
Open Access
- 29 February 2024
- journal article
- research article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 42 (2)
Abstract
The one-step deposition of spatially differentiated crystalline vanadium oxide coatings (V2O5) using an atmospheric pressure dielectric barrier discharge is reported. This feasibility study uses an original combination of immobilized filaments inside the plasma and an inductive heating device. Preliminary results show that thick crystalline deposits are achieved under the immobilized filaments, whether the interfilament spacing leads to much thinner deposits, with a different chemical composition. The gas flow inside the reactor, combined to the filament reactivity, leads to local depletions of reactants.Keywords
Funding Information
- National Fund for Scientific Research FRS-FNRS
- Fondation Jaumotte-Demoulin
This publication has 19 references indexed in Scilit:
- Immobilized Microdischarges in Pulsed DBD Plasmas for Localized Deposition and Patterning of Polymer-Like FilmsPlasma Chemistry and Plasma Processing, 2023
- Interplay between nitrogen oxides and ozone in a filamentary dielectric barrier discharge at various frequenciesPlasma Processes and Polymers, 2023
- Mechanisms of reducing energy costs for nitrogen fixation using air-based atmospheric DBD plasmas over water in contact with the electrodeChemical Engineering Journal, 2023
- Simple and Scalable Chemical Surface Patterning via Direct Deposition from Immobilized Plasma Filaments in a Dielectric Barrier DischargeAdvanced Science, 2022
- Improving the atmospheric plasma deposition of crystalline inorganic coatingsThin Solid Films, 2019
- Atmospheric pressure dielectric barrier discharge synthesis of morphology-controllable TiO2 films with enhanced photocatalytic activityThin Solid Films, 2018
- Deposition of photocatalytic anatase titanium dioxide films by atmospheric dielectric barrier dischargeSurface and Coatings Technology, 2017
- Chemical and Physical Effects of the Carrier Gas on the Atmospheric Pressure PECVD of Fluorinated PrecursorsPlasma Processes and Polymers, 2015
- CO2–CH4 conversion and syngas formation at atmospheric pressure using a multi-electrode dielectric barrier dischargeJournal of CO2 Utilization, 2015
- Ueber die elektrostatische Induction und die Verzögerung des Stroms in FlaschendrähtenAnnalen der Physik, 1857