Isotropic shrinkage of patterned vacancies enables three-dimensional nanoprecise metastructures for visible light applications

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Abstract
Three-dimensional metastructures with nanoscale feature sizes exhibit unique properties compared with structures with larger feature sizes, but are difficult to fabricate. Here we introduce implosion carving (ImpCarv), a method for photopatterning vacancies of complex geometry throughout materials, followed by isotropic shrinkage (>10-fold). ImpCarv works by photoactivating sensitizers to generate reactive oxygen species that cleave a swollen hydrogel at defined points, followed by controlled shrinkage via dehydration. ImpCarv creates three-dimensional metastructures where the refractive index of each point throughout a material can be specified with nanoscale precision via material presence or absence. By leveraging refractive index programmability for precise phase control, we demonstrate an all-optical machine learning device with nanoscale neuron sizes operating at visible wavelengths. ImpCarv may thus support diverse applications in nanophotonics and nanotechnology.
Funding Information
  • Army Research Laboratory (W911NF-23-2-0121)
  • Army Research Laboratory (W911NF-23-2-0121)
  • Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung (P2EZP2-188091)

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