Preparation and analysis of reactively evaporated a-Si:H
Authors:
- Masanari ShindoMSMasanari Shindo
- Shigeru SatoSSShigeru Sato
- Isao MyokanIMIsao Myokan
- Shigeru ManoSMShigeru Mano
- Takuji ShibataTSTakuji Shibata
- 1 December 1983
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 59-60, 747-750
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Comparative study of hydrogen evolution from amorphous hydrogenated silicon filmsThin Solid Films, 1982
- A new evaporation method for preparing hydrogenated amorphous silicon filmsSolid State Communications, 1982
- Glow discharge preparation of amorphous hydrogenated silicon from higher silanesApplied Physics Letters, 1980
- Infrared vibrational spectra of rf-sputtered hydrogenated amorphous siliconPhysical Review B, 1978