Evaluation of surface modification processes using a ternary XPS diagram

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Abstract
The use of a ternary XPS diagram to follow surface modification processes involving three elements is described. The elemental composition is represented by a single data point on a plane instead of by two or three elemental ratios or percentages. Vectors are defined between the data points, and simple vector algebra is used to interpret the results. The extent of the surface change is determined by calculating the length of the vector from untreated to a treated composition point, and this leads to a value for the overall change in elemental composition. The direction of the vector indicates how the changes in the individual elemental percentages are related to each other, i.e. what elemental composition the surface is approaching. The ternary XPS diagram is demonstrated and compared with elemental percentages and ratios using XPS data from hydrogen microwave plasma‐treated polydimethylsiloxane. Copyright © 2002 John Wiley & Sons, Ltd.