Microfabrication of oxidation-sharpened silicon tips on silicon nitride cantilevers for atomic force microscopy
Authors:
- A. FolchAFA. Folch
- M.S. WrightonMWM.S. Wrighton
- M.A. SchmidtMSM.A. Schmidt
- 1 January 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 6 (4) , 303-306
Abstract
No abstract availableThis publication has 10 references indexed in Scilit:
- AFM probes with directly fabricated tipsJournal of Micromechanics and Microengineering, 1996
- Fabrication of an ultrasharp and high-aspect-ratio microprobe with a silicon-on-insulator wafer for scanning force microscopyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 1995
- Silicon cantilevers and tips for scanning force microscopySensors and Actuators A: Physical, 1992
- Oxidation sharpening of silicon tipsJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 1991
- Microfabrication of cantilever styli for the atomic force microscopeJournal of Vacuum Science & Technology A, 1990
- Formation of silicon tips with <1 nm radiusApplied Physics Letters, 1990
- Atomic Force MicroscopePhysical Review Letters, 1986
- Silicon as a mechanical materialProceedings of the IEEE, 1982
- Chemical Etching of SiliconJournal of the Electrochemical Society, 1960
- Chemical Etching of SiliconJournal of the Electrochemical Society, 1959