Demonstration of 200-, 100-, and 50-$\mu$ m Pitch Resistive AC-Coupled Silicon Detectors (RSD) With 100% Fill-Factor for 4D Particle Tracking
- 23 September 2019
- journal article
- research article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
- Vol. 40 (11) , 1780-1783
Abstract
We designed, produced, and tested RSD (Resistive AC-Coupled Silicon Detectors) devices, an evolution of the standard LGAD (Low-Gain Avalanche Diode) technology where a resistive n-type implant and a coupling dielectric layer have been implemented. The first feature works as a resistive sheet, freezing the multiplied charges, while the second one acts as a capacitive coupling for readout pads. We succeeded in the challenging goal of obtaining very fine pitch (50, 100, and 200 μm) while maintaining the signal waveforms suitable for high timing and 4D-tracking performances, as in the standard LGAD-based devices.Keywords
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Funding Information
- Italian National Institute for Nuclear Physics, Gruppo V, through the framework of the RSD Project
- Horizon 2020 Framework Programme (UFSD669529, 654168 (AIDA-2020))
- U.S. Department of Energy (DE-SC0010107)
- Dipartimenti di Eccellenza, University of Torino
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