A new a-Si TFT with Al/sub 2/O/sub 3//SiN double-layered gate insulator for 10.4-inch diagonal multicolor display
Authors:
- H. YamamotoHYH. Yamamoto
- H. MatsumaruHMH. Matsumaru
- K. ShirahashiKSK. Shirahashi
- M. NakataniMNM. Nakatani
- A. SasanoASA. Sasano
- N. KonishiNKN. Konishi
- K. TsutsuiKTK. Tsutsui
- T. TsukadaTTT. Tsukada
- 4 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 851-854