Structure of ceramics produced through high-temperature nitridation of hafnium foil
- 1 April 2017
- journal article
- Published by Pleiades Publishing Ltd in Inorganic Materials
- Vol. 53 (4) , 424-428
Abstract
The high-temperature hafnium nitridation process, with HfNx formation, comprises two stages. With increasing nitridation temperature and time, the lattice parameter of the nitride decreases. The observed discrete nucleation of nitride microcrystals on the surface is a consequence of metal diffusion through an amorphous carboxynitride. No structural defects were detected by high-resolution transmission electron microscopy in selected areas.Keywords
This publication has 1 reference indexed in Scilit:
- Metal‐Organic CVD of Conductive and Crystalline Hafnium Nitride FilmsChemical Vapor Deposition, 2005