Monolithic silicon accelerometer
Authors:
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3) , 273-277
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Optical measurement of silicon membrane and beam thickness using a reflectance spectrometerIEEE Transactions on Electron Devices, 1988
- The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water SolutionsJournal of the Electrochemical Society, 1979