Effect of Oxygen Impurities on the Nitridation of High‐Purity Silicon

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1 March 1973

journal article
Published by Wiley in Journal of the American Ceramic Society

Vol. 56 (3) , 171-172
DOI:10.1111/j.1151-2916.1973.tb15436.x

Abstract

No abstract available

This publication has 1 reference indexed in Scilit:

Kinetics of the Oxidation and Nitridation of Silicon at High Temperatures
The Journal of Physical Chemistry, 1958