Scaling up the sub-50 nm-resolution roll-to-roll nanoimprint lithography process via large-area tiling of flexible molds and uniform linear UV curing
Authors:
- 31 December 2022
- journal article
- research article
- Published by Springer Nature in Journal of Mechanical Science and Technology
- Vol. 37 (1) , 271-278
Abstract
No abstract availableKeywords
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