Electrical levitation for micromotors, microgyroscopes and microaccelerometers
Authors:
- 30 June 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 54 (1-3) , 741-745
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Electrostatically levitated microactuatorsJournal of Micromechanics and Microengineering, 1992
- Experimental study of electric suspension for microbearingsJournal of Microelectromechanical Systems, 1992
- A proposal for electrically levitating micromotorsSensors and Actuators A: Physical, 1990