Improvement of sensitivity using principal component analysis by dual focused ion beam time-of-flight secondary ion mass spectrometry
Authors:
- Yoshihiro MoritaYMYoshihiro Morita
- Masanori OwariMOMasanori Owari
- 1 December 2008
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 255 (4) , 1052-1054
Abstract
No abstract availableKeywords
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- Quantitative analysis by submicron secondary ion mass spectrometryJournal of Vacuum Science & Technology B, 1988