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  3. Corrigendum to “Ultrathin monolithic HfO2 formed by Hf-seeded atomic layer deposition on MoS2: Film characteristics and its transistor application” [Thin Solid Films 673 (2019) 112-118]
  1. Home
  2. Publications
  3. Corrigendum to “Ultrathin monolithic HfO2 formed by Hf-seeded atomic layer deposition on MoS2: Film characteristics and its transistor application” [Thin Solid Films 673 (2019) 112-118]

Corrigendum to “Ultrathin monolithic HfO2 formed by Hf-seeded atomic layer deposition on MoS2: Film characteristics and its transistor application” [Thin Solid Films 673 (2019) 112-118]

Authors:
  • Taejin Park
    Taejin Park
  • Seongjae Park
    Seongjae Park
  • Hyangsook Lee
    Hyangsook Lee
  • CLChangmin Lee
    Changmin Lee
  • Eunha Lee
    Eunha Lee
  • Seong-Jun Jeong
    Seong-Jun Jeong
  • Seongjun Park
    Seongjun Park
  • Yunseok Kim
    Yunseok Kim
  • Hyoungsub Kim
    Hyoungsub Kim

Publisher website
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  • 1 March 2021
    • journal article
    • correction
    • Published by Elsevier in Thin Solid Films
    • Vol. 721, 138544
    • DOI:10.1016/j.tsf.2021.138544
Abstract
No abstract available
Keywords
  • DEPOSITION
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