High rate growth of microcrystalline silicon at low temperatures
Authors:
- Michio KondoMKMichio Kondo
- Makoto FukawaMFMakoto Fukawa
- Lihui GuoLGLihui Guo
- Akihisa MatsudaAMAkihisa Matsuda
- 1 May 2000
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 266-269, 84-89
Abstract
No abstract availableThis publication has 7 references indexed in Scilit:
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