Humidity Sensor Using Antimony Phosphate Operative at a Medium Temperature of 150–250°C

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Abstract
A humidity sensor using a proton conductive antimony phosphate (HSb(PO4)2) operative at a medium temperature was developed. The sensor could detect water vapor pressure (P H2O) in the range from 0.05 to 4.1 kPa at 150–250°C. Its humidity sensitivity (impedance change) was relatively high, especially in the low P H2O range, i.e., lower than ca. 0.2 kPa. The 90% response time of the sensor to the change in P H2O from 2 to 4 kPa was about 2 min. The sensor impedance was stable for a test period of 40 h under 3.3 kPa at 200°C. Moreover, the impedance was found to be affected only slightly by other coexistent reducible gases.

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