Analytic model of power deposition in inductively coupled plasma sources
Authors:
- 1 August 1995
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 78 (3) , 1446-1458
Abstract
A simple analytic model valid for all collisionality regimes is developed to describe the power deposition in a cylindrical inductively coupled plasma source with a planar coil. The heating is ohmic at high pressures and remains finite at low pressures. The low-pressure collisionless heating is due to kinetic nonlocal effects. The model is in good agreement with other calculations of collisionless heating. A diffusion model is then used to determine the plasma density profile and the electron temperature in terms of the gas pressure and the source geometry. The heating and diffusion models are used to determine the scaling of the inductive electric field with applied frequency and input power, and the results are compared with published experimental data to verify the scaling.Keywords
This publication has 12 references indexed in Scilit:
- Two-dimensional fluid model of high density inductively coupled plasma sourcesJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 1994
- Two-dimensional modeling of high plasma density inductively coupled sources for materials processingJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 1994
- Collisionless electron heating in an inductively coupled dischargePhysical Review Letters, 1993
- Novel radio-frequency induction plasma processing techniquesJournal of Vacuum Science & Technology A, 1993
- Electromagnetic fields in a radio-frequency induction plasmaJournal of Vacuum Science & Technology A, 1993
- Langmuir probe measurements of a radio frequency induction plasmaJournal of Vacuum Science & Technology A, 1993
- A simple analysis of an inductive RF dischargePlasma Sources Science and Technology, 1992
- The theory of the anomalous skin effect in metalsProceedings of the Royal Society of London. A. Mathematical and Physical Sciences, 1948
- The surface impedance of superconductors and normal metals at high frequencies III. The relation between impedance and superconducting penetration depthProceedings of the Royal Society of London. A. Mathematical and Physical Sciences, 1947
- The surface impedance of superconductors and normal metals at high frequencies II. The anomalous skin effect in normal metalsProceedings of the Royal Society of London. A. Mathematical and Physical Sciences, 1947