Achievement of normally-off AlGaN/GaN high-electron mobility transistor with p-NiOx capping layer by sputtering and post-annealing
Authors:
- Shyh-Jer HuangSHShyh-Jer Huang
- Cheng-Wei ChouCCCheng-Wei Chou
- Yan-Kuin SuYSYan-Kuin Su
- Jyun-Hao LinJLJyun-Hao Lin
- Hsin-Chieh YuHYHsin-Chieh Yu
- De-Long ChenDCDe-Long Chen
- Jian-Long RuanJRJian-Long Ruan
- 1 April 2017
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 401, 373-377
Abstract
No abstract availableFunding Information
- Ministry of Science and Technology of Taiwan, ROC (105-2218-E-006-010, 105WFA0951740)
- ational Chung-Shan Institute of Science & Technology (NCSIST-0622-V402 (106))
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