Suspended SOI waveguide with sub-wavelength grating cladding for mid-infrared
- 25 September 2014
- journal article
- Published by Optica Publishing Group in Optics Letters
- Vol. 39 (19) , 5661-5664
Abstract
We present a new type of mid-infrared silicon-on-insulator (SOI) waveguide. The waveguide comprises a sub-wavelength lattice of holes acting as lateral cladding while at the same time allowing for the bottom oxide (BOX) removal by etching. The waveguide loss is determined at the wavelength of 3.8 μm for structures before and after being underetched using both vapor phase and liquid hydrofluoric acid (HF). A propagation loss of 3.4 dB/cm was measured for a design with a 300 nm grating period and 150 nm holes after partial removal (560 nm) of BOX by vapor phase HF etching. We also demonstrate an alternative design with 550 nm period and 450 nm holes, which allows a faster and complete removal of the BOX by liquid phase HF etching, yielding the waveguide propagation loss of 3.6 dB/cm.Keywords
Funding Information
- Engineering and Physical Sciences Research Council (EPSRC) (EP/L01162X/1)
- Royal Society (UF120053)
This publication has 11 references indexed in Scilit:
- Silicon photonic devices and platforms for the mid-infraredOptical Materials Express, 2013
- Mid-infrared Suspended Membrane Waveguide and Ring Resonator on Silicon-on-InsulatorIEEE Photonics Journal, 2012
- FOURIER BASED COMBINED TECHNIQUES TO DESIGN NOVEL SUB-WAVELENGTH OPTICAL INTEGRATED DEVICESProgress In Electromagnetics Research, 2012
- High-Performance Multimode Interference Coupler in Silicon Waveguides With Subwavelength StructuresIEEE Photonics Technology Letters, 2011
- Continuously apodized fiber-to-chip surface grating coupler with refractive index engineered subwavelength structureOptics Letters, 2010
- Subwavelength grating periodic structures in silicon-on-insulator: a new type of microphotonic waveguideOptics Express, 2010
- Mid-infrared photonics in silicon and germaniumNature Photonics, 2010
- Refractive index engineering with subwavelength gratings for efficient microphotonic couplers and planar waveguide multiplexersOptics Letters, 2010
- Waveguide grating coupler with subwavelength microstructuresOptics Letters, 2009
- Silicon waveguided components for the long-wave infrared regionJournal of Optics A: Pure and Applied Optics, 2006