Electron microscopy study of sputtered NbN films
Authors:
- H.L. HoHHH.L. Ho
- R.T. KampwirthRKR.T. Kampwirth
- K.E. GrayKGK.E. Gray
- D.W. CaponeDCD.W. Capone
- L.S. ChumbleyLCL.S. Chumbley
- M. MeshiiMMM. Meshii
- 1 January 1987
- journal article
- Published by Elsevier in Ultramicroscopy
- Vol. 22 (1-4) , 297-303
Abstract
No abstract availableKeywords
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