Some of the current trends in the studies of sputtering
Authors:
- 1 June 1989
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects and Defects in Solids
- Vol. 108 (2) , 307-335
Abstract
The main directions in experimental, theoretical and computer studies of sputtering of solids under ion bombardment are analyzed. It is emphasized that there is a close relation between these studies and practical applications of sputtering.Keywords
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