Columnar structure of reactively sputtered aluminium nitride films
Authors:
- Chi-San ChenCCChi-San Chen
- Bing-Hwai HwangBing-Hwai Hwang
- Hong-Yang LuHLHong-Yang Lu
- Tzu-Chien HsuTHTzu-Chien Hsu
- 10 October 2002
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 35 (20) , 2608-2613
Abstract
No abstract availableKeywords
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