Micromachining of GaAs structures with an acidic hydrogen peroxide solution
Authors:
- C.R. TellierCTC.R. Tellier
- G. HuveGHG. Huve
- T.G. LebloisTLT.G. Leblois
- 1 February 2006
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 127 (1) , 179-193
Abstract
No abstract availableKeywords
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