Micro-fabrication of polymeric devices using hot roller embossing
Authors:
- Lip Pin YeoLYLip Pin Yeo
- Sum Huan NgSNSum Huan Ng
- Zhenfeng WangZWZhenfeng Wang
- Zhiping WangZWZhiping Wang
- Nicolaas Frans de RooijNRNicolaas Frans de Rooij
- 1 April 2009
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 86 (4-6) , 933-936
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Reflow dynamics of thin patterned viscous filmsApplied Physics Letters, 2008
- Optimization of demolding temperature for throughput improvement of nanoimprint lithographyMicroelectronic Engineering, 2007
- Development of a multi-layer microelectrofluidic platformMicrosystem Technologies, 2007
- Simulations of nonuniform embossing: The effect of asymmetric neighbor cavities on polymer flow during nanoimprint lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2005
- Utilizing roll-to-roll techniques for manufacturing source-drain electrodes for all-polymer transistorsSynthetic Metals, 2005
- Polymer microfluidic devicesTalanta, 2002
- Gravure-offset-printing technique for the fabrication of solid filmsApplied Surface Science, 1999
- Hot embossing in polymers as a direct way to pattern resistMicroelectronic Engineering, 1998