Effect of nitrogen flow rate on structure and properties of MoNx coatings deposited by facing target sputtering
Authors:
- Tao WangTWTao Wang
- Guojun ZhangGZGuojun Zhang
- Shuai RenSRShuai Ren
- Bailing JiangBJBailing Jiang
- 1 April 2017
- journal article
- research article
- Published by Elsevier in Journal of Alloys and Compounds
- Vol. 701, 1-8
Abstract
No abstract availableKeywords
Funding Information
- National Natural Science Foundation of China (51601144, 51371141, 51674196)
- Science Technology Co-ordination Innovation Project of Shaanxi Province (2013KTZB01-03-04)
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