Preparation and Properties of (Pb, La)TiO3 Epitaxial Thin Films by Multi-Target Sputtering

Authors:
  • HAHideaki Adachi
    Hideaki Adachi
  • TMTsuneo Mitsuyu
    Tsuneo Mitsuyu
  • OYOsamu Yamazaki
    Osamu Yamazaki
  • KWKiyotaka Wasa
    Kiyotaka Wasa
Publisher website
Google Scholar
Abstract
A reactive multi-target sputtering method was applied to prepare epitaxial (Pb, La)TiO3 thin films on sapphire. The individual control of each sputtering target revealed that the incident Pb content remarkably influenced the quality of thin film. The strict control of (Pb, La)TiO3 composition was carried out and strong electro-optic effect was observed in (Pb0.74La0.26)Ti0.94 O3 thin film.