Picosecond laser system with a wavelength of 193nm based on a solid-state Nd:YAG laser, parametric oscillator, and ArF amplifier
- 1 October 2014
- journal article
- Published by Allerton Press in Physics of Wave Phenomena
- Vol. 22 (4) , 223-226
Abstract
Powerful picosecond UV pulses at a wavelength of 193nm are produced using a Nd:YAG laser radiating at a wavelength of 193nm with subsequent nonlinear transformations of the radiation and amplification in an excimer gain medium to an energy of 10 mJ.Keywords
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