Effect of CH4 concentration on the early growth stage of patterned diamond using high seeding density and hot filament chemical vapor deposition

This publication has 65 references indexed in Scilit:

• In-situ monitoring of microwave plasma-enhanced chemical vapour deposition diamond growth on silicon using spectroscopic ellipsometry
  Carbon, 2022
• Effect of precursor stoichiometry on morphology, phase purity, and texture formation of hot filament CVD diamond films grown on Si (100) substrate
  Journal of Materials Science: Materials in Electronics, 2020
• Raman and Thermoluminescence Studies of HPHT Synthetic Nanodiamond Powders
  Physica Status Solidi (a), 2018
• Simultaneous determination of the lattice thermal conductivity and grain/grain thermal resistance in polycrystalline diamond
  Acta Materialia, 2017
• Surface morphology, growth rate and quality of diamond films synthesized in hot filament CVD system under various methane concentrations
  Applied Surface Science, 2011
• Crystalline quality and phase purity of CVD diamond films studied by Raman spectroscopy
  Journal of Materials Science, 2007
• Characterization of crystal faces of polycrystalline HFCVD diamond films by STM/STS
  Analytical and Bioanalytical Chemistry, 1997
• Growth rate studies of CVD diamond in an RF plasma torch
  Plasma Chemistry and Plasma Processing, 1994
• Selected-area diamond deposition on Si substrates pre-treated in different ways
  Surface and Coatings Technology, 1994
• The effects of microcrystal size and shape on the one phonon Raman spectra of crystalline semiconductors
  Solid State Communications, 1986