Molecular dynamics investigation of ultrasonic vibration-assisted polishing process for the alternating surface of Graphene/GaN layered composite
Authors:
- Qiwei SunQSQiwei Sun
- Zhan ZhangZZZhan Zhang
- Bei WangBWBei Wang
- Wenjing XuWXWenjing Xu
- Tinghong GaoTinghong Gao
- Qingquan XiaoQXQingquan Xiao
- Jin HuangJHJin Huang
- Yunjun RuanYRYunjun Ruan
- Wensheng YangWYWensheng Yang
- 21 October 2026
- journal article
- Published by Elsevier in Materials Science in Semiconductor Processing
- Vol. 218
Abstract
No abstract availableFunding Information
- National Natural Science Foundation of China
This publication has 56 references indexed in Scilit:
- Atomic-scale deformation behavior and damage protection mechanisms in nano-scratching of single crystal GaN assisted by multilayer graphene lubricationApplied Surface Science, 2026
- Establishment of strain rate prediction model for ultrasonic elliptical vibration cutting of 92W-5Ni-3FeTungsten, 2025
- High interfacial thermal conductance across heterogeneous GaN/graphene interfaceApplied Surface Science, 2022
- Gallium nitride wafer slicing by a sub-nanosecond laser: effect of pulse energy and laser shot spacingApplied Physics A, 2021
- Molecular dynamics study on deformation behaviour of monocrystalline GaN during nano abrasive machiningApplied Surface Science, 2020
- A numerical study of ultraprecision machining of monocrystalline silicon with laser nano-structured diamond tools by atomistic simulationApplied Surface Science, 2017
- Mechanical properties of bilayer graphene sheets coupled by sp bondingCarbon, 2011
- The Spatial Distribution of Threading Dislocations in Gallium Nitride FilmsAdvanced Materials, 2009
- Fast Parallel Algorithms for Short-Range Molecular DynamicsJournal of Computational Physics, 1995
- Theoretical studies of icosahedral C60 and some related speciesChemical Physics Letters, 1986