Site-controlled and advanced epitaxial Ge/Si quantum dots: fabrication, properties, and applications
Open Access
- 8 September 2017
- journal article
- review article
- Published by IOP Publishing in Nanotechnology
- Vol. 28 (39) , 392001
Abstract
In this review, we report on fabrication paths, challenges, and emerging solutions to integrate group-IV epitaxial quantum dots (QDs) as active light emitters into the existing standard Si technology. Their potential as laser gain material for the use of optical intra- and inter-chip interconnects as well as possibilities to combine a single-photon-source-based quantum cryptographic means with Si technology will be discussed. We propose that the mandatory addressability of the light emitters can be achieved by a combination of organized QD growth assisted by templated self-assembly, and advanced inter-QD defect engineering to boost the optical emissivity of group-IV QDs at room-temperature. Those two main parts, the site-controlled growth and the light emission enhancement in QDs through the introduction of single defects build the main body of the review. This leads us to a roadmap for the necessary further development of this emerging field of CMOS-compatible group-IV QD light emitters for on-chip applications.Keywords
Funding Information
- Linz Institute of Technology (LIT-2016-1-YOU-002)
- Austrian Science Fund (P29137-N36)
This publication has 196 references indexed in Scilit:
- Plasmon lasers: coherent light source at molecular scalesLaser & Photonics Reviews, 2012
- Optical detection of a single rare-earth ion in a crystalNature Communications, 2012
- Composition uniformity of site-controlled InAs/GaAs quantum dotsJournal of Crystal Growth, 2011
- Excitation Intensity Driven PL Shifts of SiGe Islands on Patterned and Planar Si(001) Substrates: Evidence for Ge-rich Dots in IslandsDiscover Nano, 2010
- Alloying and Strain Relaxation in SiGe Islands Grown on Pit-Patterned Si(001) Substrates Probed by NanotomographyDiscover Nano, 2009
- Ordered InAs quantum dots on pre-patterned GaAs (001) by local oxidation nanolithographyJournal of Crystal Growth, 2005
- The antimony-vacancy defect in p-type germaniumApplied Physics Letters, 2005
- Ge dot organization on Si substrates patterned by focused ion beamApplied Physics Letters, 2004
- Single photon emission from site-controlled pyramidal quantum dotsApplied Physics Letters, 2004
- Transient-enhanced Si diffusion on native-oxide-covered Si(001) nanostructures during vacuum annealingApplied Physics Letters, 2003