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  3. Formation of almost delta-layered nanoparticles in SiO2 thin film on Si substrate by metal negative-ion implantation
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  5. 10.1016/j.nimb.2005.05.028
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  3. Formation of almost delta-layered nanoparticles in SiO2 thin film on Si substrate by metal negative-ion implantation
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  5. 10.1016/j.nimb.2005.05.028

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