Effect of nitrogen doping concentration on the properties of TiO2 films grown by atomic layer deposition
Authors:
- Hsyi-En ChengHCHsyi-En Cheng
- Yu-Ru ChenYCYu-Ru Chen
- Wen-Tuan WuWWWen-Tuan Wu
- Ching-Ming HsuCHChing-Ming Hsu
- 1 April 2011
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 176 (7) , 596-599
Abstract
No abstract availableKeywords
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