Gigahertz Low-Loss and High Power Handling Acoustic Delay Lines Using Thin-Film Lithium-Niobate-on-Sapphire
Open Access
- 4 May 2021
- journal article
- research article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Microwave Theory and Techniques
- Vol. 69 (7) , 3246-3254
Abstract
In this work, we present the first group of gigahertz low-loss, wideband, and high power handling delay lines (ADLs) using a thin-film lithium niobate (LiNbO 3 )-on-sapphire platform. The ADLs leverage a single-phase unidirectional transducer (SPUDT) to efficiently excite the shear horizontal surface acoustic wave (SH-SAW) in the film stack. The fabricated miniature SH-SAW ADL at 1.1 GHz shows a low insertion loss (IL) of 2.8 dB, a wide fractional bandwidth (FBW) of 6.14%, and a fast phase velocity of 5127 m/s. The device also features a high 1-dB compression point (P1dB) of 30.4 dBm. The temperature coefficient of frequency is -45 ppm/K. ADLs with delays between 12 and 172 ns have been implemented, with IL between 2.8 and 8.3 dB. SH-SAW propagation characteristics are extracted, showing a group velocity of 4747 m/s and a propagation loss of 6.73 dB/mm or 31.9 dB/μs. The simultaneous low-loss and high power handling illustrate the great potential of LiNbO 3 -on-sapphire for RF and cross domain applications at gigahertz.Keywords
Funding Information
- NSF SpecEES Programs
This publication has 46 references indexed in Scilit:
- Study of thermal nonlinearity in lithium niobate-based MEMS resonators2015
- Overview of design challenges for single phase unidirectional SAW filters2003
- SPUDT-based filters: design principles and optimization2002
- GaN-based SAW delay-line oscillatorElectronics Letters, 2001
- Surface acoustic wave device fabrication.The Journal of the Acoustical Society of America, 1996
- Thin film lithium niobate on sapphire for SAW applicationsIntegrated Ferroelectrics, 1995
- Attenuation of acoustic waves in lithium niobateThe Journal of the Acoustical Society of America, 1981
- Temperature Dependence of the Elastic, Piezoelectric, and Dielectric Constants of Lithium Tantalate and Lithium NiobateJournal of Applied Physics, 1971
- Elastic constants of synthetic single crystal corundumJournal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1966
- Elastic Constants of Synthetic Single‐Crystal Corundum at Room TemperatureJournal of the American Ceramic Society, 1960