Recent advances in X-ray nanolithography using synchrotron radiation at Super-ACO
Authors:
- F RousseauxFRF Rousseaux
- 1 May 1995
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 359 (1-2) , 388-393
Abstract
No abstract availableKeywords
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