Surface enrichment of copper due to keV Xe sputtering of an Al-Cu mixture
Authors:
- 1 October 1976
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 47 (10) , 4500-4503
Abstract
A surface enrichment of Cu due to keV Xe sputtering of Al‐Cu mixtures has been observed by high‐energy He ion backscattering and by Auger electron spectroscopy. The complementary nature of these two methods provides information on the total Cu enrichment (4.5×1015/cm2) and depth of the altered layer (∼300 Å).Keywords
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