MEMS-based gray-scale lithography
Authors:
- R. GhodssiRGR. Ghodssi
- M.H. ErvinMEM.H. Ervin
- M. DubeyMDM. Dubey
- 13 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 182-185
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Microfabrication of 3D multidirectional inclined structures by UV lithography and electroplating2002
- Combining microstereolithography and thick resist UV lithography for 3D microfabrication2002
- Simulation and experimental study of gray-tone lithography for the fabrication of arbitrarily shaped surfaces1994