Measurement on the actuating and sensing capability of a PZT microcantilever
Authors:
- Weijie DongWDWeijie Dong
- Xiaoguang LuXLXiaoguang Lu
- Mengwei LiuMLMengwei Liu
- Yan CuiYCYan Cui
- Jing WangJWJing Wang
- 19 January 2007
- journal article
- Published by IOP Publishing in Measurement Science and Technology
- Vol. 18 (3) , 601-608
Abstract
No abstract availableKeywords
This publication has 35 references indexed in Scilit:
- Fabrication and characterization of diamond AFM probe integrated with PZT thin film sensor and actuatorSensors and Actuators A: Physical, 2004
- Improving tapping mode atomic force microscopy with piezoelectric cantileversUltramicroscopy, 2004
- Novel touch sensor with piezoelectric thin film for microbial separation2004
- Characterization of sputtered ZnO thin film as sensor and actuator for diamond AFM probeSensors and Actuators A: Physical, 2002
- PZT thin films for piezoelectric microactuator applicationsSensors and Actuators A: Physical, 2002
- PZT Thin Film Bi-Layer Devices for Phase Controlled Actuation in MEMSJournal of Electroceramics, 2001
- Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilitiesSensors and Actuators A: Physical, 1999
- Piezoelectric actuation of PZT thin-film diaphragms at static and resonant conditionsSensors and Actuators A: Physical, 1996
- Sol-gel derived PZT force sensor for scanning force microscopyMaterials Chemistry and Physics, 1996
- Preparation and Properties of Piezoelectric Lead Zirconate Titanate Thin Films for Microsensors and Microactuators by Sol-Gel ProcessingJournal of the Ceramic Society of Japan, 1996