Capacitance Response of Concave Well Substrate MEMS Double Touch Mode Capacitive Pressure Sensor: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison
- 4 February 2022
- journal article
- research article
- Published by Springer Nature in Silicon
- Vol. 14 (15) , 9659-9667
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This publication has 9 references indexed in Scilit:
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