Study on grinding of LiTaO3 wafer using effective cooling and electrolyte solution
Authors:
- Wei HangWHWei Hang
- Libo ZhouLZLibo Zhou
- Kehua ZhangKZKehua Zhang
- Jun ShimizuJSJun Shimizu
- Julong YuanJYJulong Yuan
- 1 April 2016
- journal article
- research article
- Published by Elsevier in Precision Engineering
- Vol. 44, 62-69
Abstract
No abstract availableKeywords
Funding Information
- Challenging Exploratory Research (15K13840)
- Natural Science Foundation of Zhejiang Province (LY15E050022)
This publication has 5 references indexed in Scilit:
- Study on Thermal Influence of Grinding Process on LiTaO3Advanced Materials Research, 2013
- Study on Micro/Nano-Indentation of Typical Soft-Brittle MaterialsKey Engineering Materials, 2012
- Development and Application of Piezoelectric Materials for Ultrasound Generation and DetectionUltrasound, 2011
- Analysis of cracking of lithium tantalate (LiTaO3) single crystals due to thermal stressJournal of Materials Science, 2006
- Observation of nuclear fusion driven by a pyroelectric crystalNature, 2005