Deterministic Integration of Quantum Emitters and Optical Cavities in a Van Der Waals Crystal

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Abstract
Single‐photon emitters in hexagonal boron nitride (hBN) combine bright optical emission with optically addressable spin states, offering a promising platform for integrated quantum photonics. However, their stochastic creation and spectral variability have prevented deterministic integration with photonic cavities. Here we demonstrate a fabrication protocol that enables precise, deterministic coupling of pre‐selected visible emitters to circular Bragg grating (CBG) cavities in hBN. By patterning etched alignment markers and performing pre‐fabrication confocal mapping, we locate emitters with sub‐micron accuracy and design cavity geometries matched to their zero‐phonon line wavelengths. The resulting devices show enhanced emission and reliable spectral alignment between emitter and cavity mode. This work establishes a deterministic cavity‐emitter integration scheme in a van der Waals material and provides a scalable route toward on‐chip quantum photonic and spin‐based platforms using hBN.
Funding Information
  • Australian Research Council (CE200100010)
  • Australian Research Council (FT220100053)
  • Australian Research Council (DP250100973)
  • Air Force Office of Scientific Research (FA2386‐25‐1‐4044)

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