Silicon pressure sensor with integrated CMOS signal-conditioning circuit and compensation of temperature coefficient
Authors:
- H.-J. KressHKH.-J. Kress
- F. BantienFBF. Bantien
- J. MarekJMJ. Marek
- M. WillmannMWM. Willmann
- 1 October 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 25 (1-3) , 21-26
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- CMOS integrated silicon pressure sensorIEEE Journal of Solid-State Circuits, 1987
- Signal conditioning on the sensor chipSensors and Actuators, 1986
- MOS Integrated silicon pressure sensorIEEE Transactions on Electron Devices, 1985
- Silicon as a mechanical materialProceedings of the IEEE, 1982