Retroreflective grating analysis versus physical measurements of surface contour

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Abstract
The technique of retroreflective grating analysis is presented to measure surface contour. This noncontacting optical method can detect a dent with maximum depth less than 10 μm. A comparison with some physical measuring systems indicates that it has advantage over such contacting measurements, especially for specular surfaces. © 1998 Society of Photo-Optical Instrumentation Engineers.