Facet engineering of ceria and the preferential cleavage-consumption mechanism in chemical mechanical polishing
Authors:
- Xin LiXLXin Li
- Mingjian QiuMQMingjian Qiu
- Quanmin ZhangQZQuanmin Zhang
- Xu WangXWXu Wang
- Yuan WuYWYuan Wu
- Mitang WangMWMitang Wang
- Siqingaowa JinSJSiqingaowa Jin
- Wei BiWBWei Bi
- Yan ZhaoYZYan Zhao
- Wei ZhouWZWei Zhou
- bin ZhangBZbin Zhang
- Dongliang ZhangDZDongliang Zhang
Open Access
- 21 April 2026
- journal article
- Published by Elsevier in Journal of Materials Research and Technology
- Vol. 42, 5308-5322
Abstract
No abstract availableFunding Information
- Science and Technology Commission of Shanghai Municipality (25520750100)
- Natural Science Foundation of Inner Mongolia Autonomous Region (2019ZD023)
- Natural Science Foundation of Inner Mongolia Autonomous Region (2021ZD0028)
- National Key Research and Development Program of China (2023YFB3507100)
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