Effect of annealing on the properties of pristine and Zn2+ and Sm3+ codoped HfO2 films

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Abstract
Recent studies suggest that HfO2 material shows promising energy storage properties upon doping. In this work we have attempted to study the structural, optical, morphological and compositional properties of HfO2 films as well as codoped HfO2 films by annealing at 600 °C and 800 °C. Synthesis method adopted for film preparation is sol-gel based spin coating method. Dopants chosen for codoping were zinc and samarium ions as the main intention of research was to stabilize high temperaure phase so that dielectric capacity can be enhanced. XRD studies revealed transformation to cubic phase with codoping as well as increament in XRD peak intensity upon annealing from 600 °C to 800 °C. From UV-Visible studies, films are found to be transparent in the range 200 to 1100 nm. Tauc plot showed decrement in band gap upon doping as well as upon increasing the temperature of annealing from 600°C to 800 °C. The prepared thin films exhibited homogeneous surface as observed upon FESEM examination. From EDS the presence of essential elements was confirmed. These experimental observations conclude that annealing and co-doping can be crucial parameters for enhancing properties of HfO2 films.

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