Structural, optical and dielectric characterization of Au/HfO2/(Pt,TiN) capacitors
Authors:
- F. El KamelFKF. El Kamel
- Z. Ben CheikhZCZ. Ben Cheikh
- M.A. SoussouMSM.A. Soussou
- A. MoadhenAMA. Moadhen
- K. KhirouniKKK. Khirouni
- 1 January 2018
- journal article
- research article
- Published by Elsevier in Thin Solid Films
- Vol. 645, 282-289
Abstract
No abstract availableKeywords
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