Precompensation approach for improving the quality of laser direct writing patterns by a modified proximity function
Authors:
- 1 March 2000
- journal article
- Published by SPIE-Intl Soc Optical Eng in Optical Engineering
- Vol. 39 (3) , 771-775
Abstract
By applying energy conservation to the effect of a laser beam on a resist, a modified proximity function is proposed. The measured data on energy absorption in a photoresist are fitted well with the modified function. By using the new model, an effective precompensation method can be used to correct proximity effects in laser direct writing. Experimental results have been obtained on a laser direct writing machine with line width of 0.6 ?m.Keywords
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