Lateral Contact Three-State RF MEMS Switch for Ground Wireless Communication by Actuating Rhombic Structures
Authors:
- 13 December 2012
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 22 (1) , 10-12
Abstract
A laterally actuated three-state RF microelectromechanical systems switch for ground wireless communication applications is proposed, fabricated, and tested. By electrostatically actuating a rhombic beam, the proposed switch can not only realize the off-state to on -state shifting but also provide an additional deep off state. The switch was fabricated by silicon on glass (SOG) bulk silicon micromachining. The 2- μm-thick gold electroplating layers were introduced in the SOG process to enhance the performance of lateral contacts. The off-state and deep- off-state isolations of the prototype switch were measured to be -67.6 dB and - 72.2 dB at 0.9 GHz and -48.3 dB and -53.0 dB at 6 GHz, respectively. The measured insertion loss is -0.13 dB at 0.9 GHz and -0.38 dB at 6 GHz, respectively. The measured actuation voltage is 78 V. The switching-on and switching-off response times are 72 and 64 μs, respectively.Keywords
This publication has 16 references indexed in Scilit:
- A High Isolation Series-Shunt RF MEMS SwitchSensors, 2009
- A Non-Contact-Type RF MEMS Switch for 24-GHz Radar ApplicationsJournal of Microelectromechanical Systems, 2009
- Electrothermally‐actuated RF‐MEMS suspended parallel switchMicrowave and Optical Technology Letters, 2007
- Skin-Effect Self-Heating in Air-Suspended RF MEMS Transmission-Line StructuresJournal of Microelectromechanical Systems, 2006
- In-Plane Electrostatically-Actuated RF MEMS Switch Suspended on a Low-Resistivity Substrate2006
- Full-wave electromagnetic and thermal modeling for the prediction of heat-dissipation-induced RF-MEMS switch failureJournal of Micromechanics and Microengineering, 2005
- RF MEMS membrane switches on GaAs substrates for X-band applicationsJournal of Microelectromechanical Systems, 2005
- Steady state thermal analysis and high-power reliability considerations of RF MEMS capacitive switches2003
- Microswitches and microrelays with a view toward microwave applicationsInternational Journal of RF and Microwave Computer-Aided Engineering, 1999
- Performance of low-loss RF MEMS capacitive switchesIEEE Microwave and Guided Wave Letters, 1998