Research on the equivalent impact test method for different pulse widths based on micro-electro-mechanical system devices
Authors:
- Yunan ChenYCYunan Chen
- Yunbo ShiYSYunbo Shi
- Rui ZhaoRZRui Zhao
- Peng ZhangPZPeng Zhang
- Haonan GuoHGHaonan Guo
- Denghu FengDFDenghu Feng
- Xiangyu LiXLXiangyu Li
- Cui GuoCGCui Guo
- 9 April 2024
- journal article
- research article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 372
Abstract
No abstract availableKeywords
Funding Information
- Shanxi Province Natural Science Foundation
- Shanxi Provincial Key Research and Development Project
- National Natural Science Foundation of China
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