Study on the effect of heat treatment conditions on metalorganic-chemical-vapor-deposited ferroelectric Hf0.5Zr0.5O2thin film on Ir electrode
Authors:
- Takao ShimizuTSTakao Shimizu
- Tatsuhiko YokouchiTYTatsuhiko Yokouchi
- Takahisa ShiraishiTSTakahisa Shiraishi
- Takahiro OikawaTOTakahiro Oikawa
- P. S. Sankara Rama KrishnanPKP. S. Sankara Rama Krishnan
- Hioshi FunakuboHFHioshi Funakubo
- 1 September 2014
- journal article
- research article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 53 (9S) , 09PA04
Abstract
No abstract availableThis publication has 31 references indexed in Scilit:
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